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Phase-shifting shadow moire using the Carre algorithm

Author(s):
  • P. S. Huang ( Stony Brook Univ., United States )
  • H. Guo ( Stony Brook Univ., United States )
Publication title:
Two- and three-dimensional methods for inspection and metrology VI : 10-11 August 2008, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7066
Pub. Year:
2008
Page(from):
70660B-1
Page(to):
70660B-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472861 [0819472867]
Language:
English
Call no.:
P63600/7066
Type:
Conference Proceedings

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