A sensing system for monitoring the thickness of thin films by spectrum analysis of white-light interference

A sensing system for monitoring the thickness of thin films by spectrum analysis of white-light interference

Author(s):

Y. Zhu ( Nanjing Univ. of Aeronautics and Astronautics, China )
L. Zhang ( Xi'an Jiaotong Univ., China )
H. Wang ( Nanjing Univ. of Aeronautics and Astronautics, China )
H. Zhao ( Xi'an Jiaotong Univ., China )

Publication title:

Interferometry XIV : applications : 13-14 August 2008, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7064

Pub. Year:

2008

Page(from):

70640R-1

Page(to):

70640R-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819472847 [0819472840]

Language:

English

Call no.:

P63600/7064

Type:

Conference Proceedings

Details

TDL ID:	ZA00052695
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Engineering and Applications : Interferometry
Conf. info. (Number):	2008 : 14th
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2008.08.13-2008.08.14
Note for article:	Interferometry XIV, 13-14 August 2008, San Diego, California, USA - Poster Session, 70640R, 7064-28

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