New algorithms and error analysis for sinusoidal phase shifting interferometry
- Author(s):
- P. J. de Groot ( Zygo Corp., United States )
- L. L. Deck ( Zygo Corp., United States )
- Publication title:
- Interferometry XIV : techniques and analysis : 11-13 August 2008, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7063
- Pub. Year:
- 2008
- Page(from):
- 70630K-1
- Page(to):
- 70630K-14
- Pages:
- 14
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472830 [0819472832]
- Language:
- English
- Call no.:
- P63600/7063
- Type:
- Conference Proceedings
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