Inspectability of PSM masks for the 32nm node using STARlight2+
- Author(s):
- C. -T. Huang ( United Microelectronics Corp., Taiwan )
- Y. -F. Cheng ( United Microelectronics Corp., Taiwan )
- S. -M. Kuo ( United Microelectronics Corp., Taiwan )
- C. -H. Huang ( United Microelectronics Corp., Taiwan )
- S. Chakravarty ( KLA-Tencor Corp., USA )
- Publication title:
- Photomask and next-generation lithography mask technology XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7028
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 70282P-1
- Page(to):
- 70282P-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472434 [0819472433]
- Language:
- English
- Call no.:
- P63600/7028
- Type:
- Conference Proceedings
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