Impact of patterning strategy on mask fabrication beyond 32nm

Impact of patterning strategy on mask fabrication beyond 32nm

Author(s):

S. Mimotogi ( Toshiba Corp., Japan )
T. Higaki ( Toshiba Corp., Japan )
H. Kanai ( Toshiba Corp., Japan )
S. Tanaka ( Toshiba Corp., Japan )
M. Satake ( Toshiba Corp., Japan )

Publication title:

Photomask and next-generation lithography mask technology XV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

7028

Pub. Year:

2008

Vol.:

1

Page(from):

702814-1

Page(to):

702814-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819472434 [0819472433]

Language:

English

Call no.:

P63600/7028

Type:

Conference Proceedings

Details

TDL ID:	ZA00052659
Series ID:	PA00000029
Conf. info. (Name):	Photomask and Next-Generation Lithography Mask Technology
Conf. info. (Number):	2008 : 15th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	2008.04.16-2008.04.18
Note for article:	Photomask and next-generation lithography mask technology XV, 16-18 April 2008, Yokohama, Japan - OPC and Lithography Technologies II, 702814, 7028-38

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