Model based short range mask process correction
- Author(s):
- G. Chen ( Brion Technologies, Inc., USA )
- J. -S. Wang ( Brion Technologies, Inc., USA )
- S. Bai ( Brion Technologies, Inc., USA )
- R. Howell ( Brion Technologies, Inc., USA )
- J. Wiley ( Brion Technologies, Inc., USA )
- Publication title:
- Photomask and next-generation lithography mask technology XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 7028
- Pub. Year:
- 2008
- Vol.:
- 1
- Page(from):
- 70280G-1
- Page(to):
- 70280G-10
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472434 [0819472433]
- Language:
- English
- Call no.:
- P63600/7028
- Type:
- Conference Proceedings
Similar Items:
Society of Photo-optical Instrumentation Engineers |
7
Conference Proceedings
Distributed processing (DP) based e-beam lithography simulation with long range correction algorithm in e-beam machine
Society of Photo-optical Instrumentation Engineers |
2
Conference Proceedings
Dual-mask model-based proximity correction for high-performance 0.10-μm CMOS process
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Fabrication and modeling of the gray-scale mask-based asheric aspheric refraction microlens array
SPIE-The International Society for Optical Engineering |
Materials Research Society |
9
Conference Proceedings
Adjustment of optical proximity correction (OPC) software for mask process correction (MPC): Module 2. Lithography simulation based on optical mask writing tool …
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Polarized transmittance-reflectance scatterometry measurements of 2D trench dimensions on phase-shift masks
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Noninvasive blood glucose measurement system based on three wavelengths in near-infrared region
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Analysis on evolution process of the Meizizhou reach of the Yangtze River from the revetment based on GIS
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |