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Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing

Author(s):
Publication title:
Silicon photonics and photonic integrated circuits : 7-10 April 2008, Strasbourg, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6996
Pub. Year:
2008
Page(from):
699612-1
Page(to):
699612-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471949 [0819471941]
Language:
English
Call no.:
P63600/6996
Type:
Conference Proceedings

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