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Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Author(s):
Publication title:
MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6993
Pub. Year:
2008
Page(from):
69930D-1
Page(to):
69930D-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471918 [0819471917]
Language:
English
Call no.:
P63600/6993
Type:
Conference Proceedings

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