Fabrication of polymer micro-optical components for integration in silicon MOEMS
- Author(s):
- D. Cristea ( National Institute for Research and Development in Microtechnologies, Romania )
- P. Obreja ( National Institute for Research and Development in Microtechnologies, Romania )
- M. Kusko ( National Institute for Research and Development in Microtechnologies, Romania )
- M. Purica ( National Institute for Research and Development in Microtechnologies, Romania )
- A. Dinescu ( National Institute for Research and Development in Microtechnologies, Romania )
- Publication title:
- MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6993
- Pub. Year:
- 2008
- Page(from):
- 699307-1
- Page(to):
- 699307-10
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471918 [0819471917]
- Language:
- English
- Call no.:
- P63600/6993
- Type:
- Conference Proceedings
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