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Electric field assisted low-temperature growth of SiGe on insulating films for future TFT

Author(s):
Publication title:
Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6984
Pub. Year:
2008
Page(from):
69840L-1
Page(to):
69840L-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471826 [0819471828]
Language:
English
Call no.:
P63600/6984
Type:
Conference Proceedings

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