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Silicon wafers for scanning helium microscopy

Author(s):
  • D. Litwin ( Institute of Applied Optics, Poland )
  • J. Galas ( Institute of Applied Optics, Poland )
  • S. Sitarek ( Institute of Applied Optics, Poland )
Publication title:
Photonics applications in astronomy, communications, industry, and high-energy physics experiments 2007
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6937
Pub. Year:
2008
Vol.:
2
Page(from):
693740-1
Page(to):
693740-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471246 [0819471240]
Language:
English
Call no.:
P63600/6937
Type:
Conference Proceedings

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