Active damping control of micromachined devices in a low atmospheric pressure environment

Active damping control of micromachined devices in a low atmospheric pressure environment

Author(s):

S. J. Kim ( Auburn Univ., USA )
C. Chen ( Auburn Univ., USA )
G. Flowers ( Auburn Univ., USA )
R. Dean ( Auburn Univ., USA )

Publication title:

Active and passive smart structures and integrated systems 2008

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6928

Pub. Year:

2008

Page(from):

692820-1

Page(to):

692820-11

Pages:

11

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471147 [0819471143]

Language:

English

Call no.:

P63600/6928

Type:

Conference Proceedings

Details

TDL ID:	ZA00052559
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures : Active and Passive Smart Structures and Integrated Systems
Conf. info. (Number):	2008
Conf. info. (Venue):	San Diego, California, USA
Conf. info. (Date):	2008.03.10-2008.03.13
Note for article:	Active and passive smart structures and integrated systems 2008, 10-13 March 2008, San Diego, California, USA. Session 17. Active/Semi-Active/Passive Vibration Control, 692820, 6928-81

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