DfM, the teenage years

DfM, the teenage years

Author(s):: L. Liebmann ( IBM Microelectronics, USA )
Publication title:: Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 6925
Pub. Year:: 2008
Page(from):: 692502-1
Page(to):: 692502-14
Pages:: 14
Pub. info.:: Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:: 0277786X
ISBN:: 9780819471109 [0819471100]
Language:: English
Call no.:: P63600/6925
Type:: Conference Proceedings

Details

TDL ID:	ZA00052556
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Design for Manufacturability through Design-Process Integration
Conf. info. (Number):	2008 : 2nd
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.02.28-2008.02.29
Note for article:	Design for manufacturability through design-process integration II, 28-29 February 2008, San Jose, California, USA. Session 1. Keynote Session, Keynote paper, 692502, 6925-01

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