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Variable loading kernels for OPC modeling

Author(s):
  • S. L. Tsai ( Macronix International Co., Ltd., Taiwan )
  • F. Lo ( Macronix International Co., Ltd., Taiwan )
  • E. Yang ( Macronix International Co., Ltd., Taiwan )
  • T. H. Yang ( Macronix International Co., Ltd., Taiwan )
  • K. C. Chen ( Macronix International Co., Ltd., Taiwan )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
3
Page(from):
69243X-1
Page(to):
69243X-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

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