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Full chip compensation for local-flare-induced CD error using OPC/DRC method

Author(s):
  • J.-Y. Choi ( Dongbu HiTek Semiconductor Business, South Korea )
  • Y.-A. Shim ( Dongbu HiTek Semiconductor Business, South Korea )
  • K.-H. Yun ( Dongbu HiTek Semiconductor Business, South Korea )
  • J.-D. Kim ( Dongbu HiTek Semiconductor Business, South Korea )
  • J.-H. Kim ( Dongbu HiTek Semiconductor Business, South Korea )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
3
Page(from):
69243L-1
Page(to):
69243L-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

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