Blank Cover Image

Evaluation of inverse lithography technology for 55nm-node memory device

Author(s):
  • B. Cho ( Hynix Semiconductor, Inc., South Korea )
  • S. Ko ( Hynix Semiconductor, Inc., South Korea )
  • J. Choi ( Hynix Semiconductor, Inc., South Korea )
  • C.-K. Kim ( Hynix Semiconductor, Inc., South Korea )
  • H. Yang ( Hynix Semiconductor, Inc., South Korea )
Publication title:
Optical Microlithography XXI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6924
Pub. Year:
2008
Vol.:
2
Page(from):
692438-1
Page(to):
692438-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471093 [0819471097]
Language:
English
Call no.:
P63600/6924
Type:
Conference Proceedings

Similar Items:

Yoon, G.-S., Kim, S.-H., Park, J.-S., Choi, S.-Y., Jean, C.-U., Shin, I.-K., Choi, S.-W., Han, W.-S.

SPIE - The International Society of Optical Engineering

Hong, J., Woo, C., Park, J., Cho, B., Choi, J.-S., Yang, H., Park, C., Shin, Y.-C., Kim, Y., Jeong, G., Kim, J., Kang, …

SPIE-The International Society for Optical Engineering

Kim, D. Y., Cho, S. Y., Kim, H., Huh, S. M., Chung, D. H., Cha, B. C., Lee, J. W., Choi, S. W., Han, W. S., Park, K. H., …

SPIE - The International Society of Optical Engineering

Lim, C. M., Kim, S. M., Hwang, Y. S., Choi, J. -S., Ban, K. -D., Cho, S. -Y., Jung, J. K., Knag, E. -K., Lim, H. -Y., …

SPIE - The International Society of Optical Engineering

Kim, M.-S., Shim, K.-C., Kim, H.-J., Kwon, K.-S., Lee, H.-G., Lee, C.-S., Gil, M.-G., Song, Y.-W.

SPIE - The International Society of Optical Engineering

Goo, D.-H., Kim, B.-S., Park, J.-S., Yoon, K.-S., Lee, J.-H., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE-The International Society for Optical Engineering

Yang, H., Park, C., Hong, J., Jeong, G., Cho, B., Choi, J., Kang, C., Yang, K., Kang, E., Ji, S., Yim, D., Song, Y.

SPIE - The International Society of Optical Engineering

10 Conference Proceedings 100-nm node lithography with KrF?

Ferri,J.E., Tyrrell,B., Astolfi,D.K., Yost,D., Davis,P., Wheeler,B., Mallen,R., Jarmolowicz,J., Cann,S.G., Liu,H.Y., …

SPIE-The International Society for Optical Engineering

J. G. Doh, C. H. Park, Y. S. Moon, B. H. Kim, S. W. Kwon, S. Y. Choi, S. H. Kim, S. Y. Kim, B. G. Kim, S. G. Woo, H. K. …

SPIE - The International Society of Optical Engineering

Kim, C.-K., Choi, J.-S, Narn, B.-H, Yim, D.

SPIE - The International Society of Optical Engineering

Kim, J.-B., Jang, J.-H., Choi, J.-H., Lee, K.-K., Ko, J.-S.

SPIE - The International Society of Optical Engineering

Vandenberghe,G.N., Kim,Y.-C., Delvaux,C., Lucas,K.D., Choi,S.-J., Ercken,M., Ronse,K., Vleeming,B.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12