Mask optimization for arbitrary patterns with 2D-TCC resolution enhancement technique

Mask optimization for arbitrary patterns with 2D-TCC resolution enhancement technique

Author(s):

M. Kawashima ( Canon, Inc., Japan )
K. Yamazoe ( Canon, Inc., Japan )
Y. Sekine ( Canon, Inc., Japan )
M. Hakko ( Canon, Inc., Japan )
M. Ohta ( Canon, Inc., Japan )

Publication title:

Optical Microlithography XXI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6924

Pub. Year:

2008

Vol.:

1

Page(from):

69240F-1

Page(to):

69240F-12

Pages:

12

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471093 [0819471097]

Language:

English

Call no.:

P63600/6924

Type:

Conference Proceedings

Details

TDL ID:	ZA00052555
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical Microlithography
Conf. info. (Number):	2008 : 21st
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.02.26-2008.02.29
Note for article:	Optical Microlithography XXI, 26-29 February 2008, San Jose, California, USA. Session 4. Low-k1 Lithography I, 69240F, 6924-14

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