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Development of new BARC for immersion process using hyper NA

Author(s):
  • H. J. Roh ( Dongjin Semichem Co. Ltd., South Korea )
  • M. H. Han ( Dongjin Semichem Co. Ltd., South Korea )
  • S. J. Kim ( Dongjin Semichem Co. Ltd., South Korea )
  • H. J. Kim ( Dongjin Semichem Co. Ltd., South Korea )
  • J. Kim ( Dongjin Semichem Co. Ltd., South Korea )
Publication title:
Advances in resist materials and processing technology XXV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6923
Pub. Year:
2008
Vol.:
2
Page(from):
69232T-1
Page(to):
69232T-10
Pages:
10
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471086 [0819471089]
Language:
English
Call no.:
P63600/6923
Type:
Conference Proceedings

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