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Development of bock-end-of-the-line applications using optical digital profilometry (ODP)

Author(s):
  • J.-J. Huang ( United Microelectronics Corp., Taiwan )
  • J. H. Yeh ( United Microelectronics Corp., Taiwan )
  • Y. Luo ( Timbre Technologies, USA )
  • L. Wu ( Timbre Technologies, USA )
  • Y. Wen ( Timbre Technologies, USA )
Publication title:
Metrology, inspection, and process control for microlithography XXII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6922
Pub. Year:
2008
Vol.:
2
Page(from):
69223K-1
Page(to):
69223K-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471079 [0819471070]
Language:
English
Call no.:
P63600/6922
Type:
Conference Proceedings

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