Plasma Sn cleaning integrated in EUV source system
- Author(s):
- H. Shin ( Univ. of Illinois at Urbana-Champaign, USA )
- R. Raju ( Univ. of Illinois at Urbana-Champaign, USA )
- D. N. Ruzic ( Univ. of Illinois at Urbana-Champaign, USA )
- Publication title:
- Emerging lithographic technologies XII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6921
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 692132-1
- Page(to):
- 692132-8
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471062 [0819471062]
- Language:
- English
- Call no.:
- P63600/6921
- Type:
- Conference Proceedings
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