Dependence of EUV mask printing performance on blank architecture
- Author(s):
- R. Jonckheere ( IMEC vzw, Belgium )
- Y. Hyun ( IMEC vzw, Belgium )
- F. Iwamoto ( IMEC vzw, Belgium )
- B. Baudemprez ( IMEC vzw, Belgium )
- J. Hermans ( IMEC vzw, Belgium )
- Publication title:
- Emerging lithographic technologies XII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6921
- Pub. Year:
- 2008
- Vol.:
- 2
- Page(from):
- 69211W-1
- Page(to):
- 69211W-14
- Pages:
- 14
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471062 [0819471062]
- Language:
- English
- Call no.:
- P63600/6921
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Assessment of EUV reticle blank availability enabling the use of EUV tools today and in the future
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
11
Conference Proceedings
High-performance 6-in. EUV mask blanks produced under real production conditions by ion-beam sputter deposition
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Architectural choices for EUV lithography masks: patterned absorbers and patterned reflectors
SPIE - The International Society of Optical Engineering |