Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)
- Author(s):
- F. Y. Gardes ( Univ. of Surrey, United Kingdom )
- G. T. Reed ( Univ. of Surrey, United Kingdom )
- A. P. Knights ( McMaster Univ., Canada )
- G. Mashanovich ( Univ. of Surrey, United Kingdom )
- P. E. Jessop ( McMaster Univ., Canada )
- Publication title:
- Silicon photonics III : 21-24 January 2008, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6898
- Pub. Year:
- 2008
- Page(from):
- 68980R-1
- Page(to):
- 68980R-4
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470737 [0819470732]
- Language:
- English
- Call no.:
- P63600/6898
- Type:
- Conference Proceedings
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