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Sub-micron optical waveguides for silicon photonics formed via the local oxidation of silicon (LOCOS)

Author(s):
Publication title:
Silicon photonics III : 21-24 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6898
Pub. Year:
2008
Page(from):
68980R-1
Page(to):
68980R-4
Pages:
4
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470737 [0819470732]
Language:
English
Call no.:
P63600/6898
Type:
Conference Proceedings

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