Fabrication of single crystalline MEMS DM using anodic wafer bonding

Fabrication of single crystalline MEMS DM using anodic wafer bonding

Author(s):

A. Diouf ( Boston Univ., USA )
M. Gingras ( Boston Univ., USA )
J. B. Stewart ( Boston Univ., USA )
T. G. Bifano ( Boston Univ., USA )
S. Cornelissen ( Boston Micromachines Corp., USA )

Publication title:

MEMS adaptive optics II : 22-24 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6888

Pub. Year:

2008

Page(from):

68880U-1

Page(to):

68880U-11

Pages:

11

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470638 [0819470635]

Language:

English

Call no.:

P63600/6888

Type:

Conference Proceedings

Details

TDL ID:	ZA00052519
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MEMS Adaptive Optics
Conf. info. (Number):	2008 : 2nd
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.01.22-2008.01.24
Note for article:	MEMS adaptive optics II, 22-24 January 2008, San Jose, California, USA - Devices II (68880U/6888-29)

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