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Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior

Author(s):
  • K. M. Morzinski ( National Science Foundation Ctr. for Adaptive Optic's, USA )
  • D. T. Gavel ( National Science Foundation Ctr. for Adaptive Optic's, USA )
  • A. P. Norton ( National Science Foundation Ctr. for Adaptive Optic's, USA )
  • D. R. Dillon ( National Science Foundation Ctr. for Adaptive Optic's, USA )
  • M. R. Reinig ( National Science Foundation Ctr. for Adaptive Optic's, USA )
Publication title:
MEMS adaptive optics II : 22-24 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6888
Pub. Year:
2008
Page(from):
68880S-1
Page(to):
68880S-12
Pages:
12
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470638 [0819470635]
Language:
English
Call no.:
P63600/6888
Type:
Conference Proceedings

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