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Dual-detector optical MEMS spectrum analyzer: advances, applications, and prospects

Author(s):
  • T. Otto ( Fraunhofer Institute for Reliability and Microintegration, Germany )
  • R. Saupe ( Fraunhofer Institute for Reliability and Microintegration, Germany )
  • A. Weiss ( Chemnitz Univ. of Technology, Germany )
  • V. Stock ( Colour Control Farbmesstechnik GmbH, Germany )
  • K. Wiesner ( Siemens AG, Germany )
Publication title:
MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6887
Pub. Year:
2008
Page(from):
68870D-1
Page(to):
68870D-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470621 [0819470627]
Language:
English
Call no.:
P63600/6887
Type:
Conference Proceedings

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