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Novel 3D micromirror for miniature optical bio-probe SiOB assembly

Author(s):
  • J. Singh ( Institute of Microelectronics, Singapore )
  • Y. Xu ( Institute of Microelectronics, Singapore )
  • C. S. Premachandran ( Institute of Microelectronics, Singapore )
  • T. H. S. Jason ( Institute of Microelectronics, Singapore )
  • N. Chen ( National Univ. of Singapore, Singapore )
Publication title:
Microfluidics, bioMEMS, and medical microsystems VI : 21-22 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6886
Pub. Year:
2008
Page(from):
688608-1
Page(to):
688608-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470614 [0819470619]
Language:
English
Call no.:
P63600/6886
Type:
Conference Proceedings

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