Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device
- Author(s):
- Publication title:
- MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6885
- Pub. Year:
- 2008
- Page(from):
- 68850B-1
- Page(to):
- 68850B-11
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470607 [0819470600]
- Language:
- English
- Call no.:
- P63600/6885
- Type:
- Conference Proceedings
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