Development of nondestructive testing/evaluation methodology for MEMS

Development of nondestructive testing/evaluation methodology for MEMS

Author(s):

J. L. Zunino III ( U.S. Army RDE Command, USA )
D. R. Skelton ( U.S. Army RDE Command, USA )
R. T. Marinis ( Worcester Polytechnic Institute, USA )
A. R. Kiempner ( Worcester Polytechnic Institute, USA )
P. Hefti ( Worcester Polytechnic Institute, USA )

Publication title:

Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6884

Pub. Year:

2008

Page(from):

688407-1

Page(to):

688407-12

Pages:

12

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470591 [0819470597]

Language:

English

Call no.:

P63600/6884

Type:

Conference Proceedings

Details

TDL ID:	ZA00052515
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
Conf. info. (Number):	2008 : 7th
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.01.21-2008.01.22
Note for article:	Reliability, packaging, testing, and characterization of MEMS/MOEMS VII, 21-22 January 2008, San Jose, California, USA - Session 2. MEMS/MNT Analytical Techniques (688407/6884-06)

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