Blank Cover Image

Enhancing direct-write laser control techniques for bimetallic grayscale photomasks

Author(s):
Publication title:
Advanced fabrication technologies for micro/nano optics and photonics : 21-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6883
Pub. Year:
2008
Page(from):
688312-1
Page(to):
688312-12
Pages:
12
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470584 [0819470589]
Language:
English
Call no.:
P63600/6883
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks

J. M. Dykes, C. Plesa, C. Choo, G. H. Chapman

Society of Photo-optical Instrumentation Engineers
7 Conference Proceedings Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions [5992-20]

Poon, D. K., Chapman, G. H., Choo, C., Wang, J., Tu, Y., La haye, M. L.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks

Chapman, G.H., Dykes, J., Poon, D., Choo, C., Wang, J., Peng, J., Tu, Y.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks [6106A-18]

Poon, D. K., Chapman, G. H., Choo, C., Chang, M., Wang, J., Tu, Y.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Calibrating grayscale direct write bimetallic photomasks to create 3D photoresist structures

Tu, Y., Chapman, G. H., Dykes, J., Poon, D., Choo, C., Peng, J.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Creating 3D structures with a direct-write grayscale photomask made from Sn/In bimetallic films

Chapman, G., Tu, Y., Peng, J.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Improving the optical characteristics of bimetallic grayscale photomasks

J. M. Dykes, D. K. Poon, J. Wang, J. T. K. Tsui, G. H. Chapman

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Laster-induced oxidation of Zn alloy films for direct-write grayscale photomasks [6106A-17]

Wang, J., Chang, M., Tu, Y., Poon, D. K., Chapman, G. H., Choo, C., Peng, J.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Effects of heated substrates on bimetallic thermal resist for lithography and grayscale photomask applications

J. M. Dykes, P. Tsui, J. Leung, G. H. Chapman

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Adding grayscale layer to chrome photomasks [6349-117]

Poon, D. K., Dykes, J. M., Choo, C., Tsui, J. T. K., Wang, J., Chapman, G. H., Tu, Y., Reynolds, P., Zanzal, A.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Creating direct-write gray-scale photomasks with bimetallic thin film thermal resists

Chapman, G.H., Tu, Y., Dykes, J., Mio, M., Peng, J.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Laser direct write patterned indium tin oxide films for photomasks and anisotropic resist applications

Peng, J., Chapman, G. H., Tu, Y.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12