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Toward sub-10-nm resolution zone plates using the overlay nanofabrication processes

Author(s):
  • W. Chao ( Lawrence Berkeley National Lab., USA )
  • E. H. Anderson ( Lawrence Berkeley National Lab., USA )
  • P. Fischer ( Lawrence Berkeley National Lab., USA )
  • D.-H. Kim ( Chungbuk National Univ., South Korea )
Publication title:
Advanced fabrication technologies for micro/nano optics and photonics : 21-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6883
Pub. Year:
2008
Page(from):
688309-1
Page(to):
688309-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470584 [0819470589]
Language:
English
Call no.:
P63600/6883
Type:
Conference Proceedings

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