Dry film process development for electroplating and IM-off of metal layers

Dry film process development for electroplating and IM-off of metal layers

Author(s):

P. R. Kanikella ( Missouri Univ. of Science & Technology, USA )
M. J. O'Keefe ( Missouri Univ. of Science & Technology, USA )
C.-S. Kim ( Missouri Univ. of Science & Technology, USA )

Publication title:

Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6882

Pub. Year:

2008

Page(from):

68820L-1

Page(to):

68820L-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470577 [0819470570]

Language:

English

Call no.:

P63600/6882

Type:

Conference Proceedings

Details

TDL ID:	ZA00052513
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	2008 : 13th
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.01.22-2008.01.23
Note for article:	Micromachining and microfabrication process technology XIII, 22-23 January 2008, San Jose, California, USA - Poster Session (68820L/6882-20)

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