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Micro-inductors integrated on silicon for DC-DC converters

Author(s):
T. El Mastouli ( Univ. de Toulouse, France )
J. P. Laur ( Univ. de Toulouse, France )
J. L. Sanchez ( LAAS, CNRS 7, France )
M. Brunet ( LAAS, CNRS 7, France )
D. Bourrier ( LAAS, CNRS 7, France )
M. Dilhan ( LAAS, CNRS 7, France )
1 more
Publication title:
Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6882
Pub. Year:
2008
Page(from):
68820A-1
Page(to):
68820A-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470577 [0819470570]
Language:
English
Call no.:
P63600/6882
Type:
Conference Proceedings

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