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Interactions between pulsed laser-induced plasma and ECR microwave plasma

Author(s):
  • J. Tang ( Fudan Univ., China )
  • J. Sun ( Fudan Univ., China )
  • H. Wang ( Univ. of Nebraska-Lincoln, USA )
  • J. Shao ( Fudan Univ., China )
  • H. Ling ( Univ. of Nebraska-Lincoln, USA )
Publication title:
Laser-based micro- and nanopackaging and assembly II : 22-24 January 2008, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6880
Pub. Year:
2008
Page(from):
68800M-1
Page(to):
68800M-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470553 [0819470554]
Language:
English
Call no.:
P63600/6880
Type:
Conference Proceedings

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