Nanoscale growth control of functional thin films on atomically surface-controlled substrates by laser MBE

Nanoscale growth control of functional thin films on atomically surface-controlled substrates by laser MBE

Author(s):

W. Hara ( Tokyo Institute of Technology, Japan )
M. Yoshimoto ( Tokyo Institute of Technology, Japan )

Publication title:

Photon processing in microelectronics and photonics VII : 21-24 January 2008, San Jose, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6879

Pub. Year:

2008

Pt.:

A

Page(from):

68790V-1

Page(to):

68790V-9

Pages:

9

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470546 [0819470546]

Language:

English

Call no.:

P63600/6879

Type:

Conference Proceedings

Details

TDL ID:	ZA00052510
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Photon Processing in Microelectronics and Photonics
Conf. info. (Number):	2008 : 7th
Conf. info. (Venue):	San Jose, California, USA
Conf. info. (Date):	2008.01.21-2008.01.24
Note for article:	Photon processing in microelectronics and photonics VII, 21-24 January 2008, San Jose, California, USA - Laser Deposition and Modification Processes. Part A. Laser applications in microelectronic and optoelectronic manufacturing XIII, Invited paper (68790V/6879A-31)

Similar Items:

1 Conference Proceedings Laser MBE for Atomically Defined Ceramic Film Growth Koinuma, H., Kawasaki, M., Yoshimoto, M. MRS - Materials Research Society	7 Conference Proceedings MICROSTRUCTURE OF THIN LAYERS OF MBE-GROWTH GaAS ON Si SUBSTRATES Rosner, S.J., Koch, S.M., Lederman, S., Harris, J.Jr. S. Materials Research Society
2 Conference Proceedings Atomic-Scale Analysis of Laser MBE Growth of Oxide Thin Films by In Situ RHEED and CAICISS Yoshimoto, M., Ohnishi, T., Lee, G-H., Sasaki, K., Maruta, H., Koinuma, H. MRS - Materials Research Society	8 Conference Proceedings MBE GROWTH AND CHARACTERIZATION OF GaAs THIN FILMS ON SiGe BUFFER LAYERS Prokes, S.M., Tseng, W.F., Wilkins, B.R., Dietrich, H., Christou, A. Materials Research Society
3 Conference Proceedings *Atomic-scale control of oxide substrate surface/termination and novel heteroepitaxian growth Yoshimoto, Mamoru, Mizuno, Keisuke, Miyahara, Takafumi MRS-Materials Research Society	9 Conference Proceedings MBE Growth of III-V Nitride Thin Films and Quantum Well Structures Johnson,M.A.L., ,N.A.El-Masry Jr., J.W.Cook,Jr, Schetzina,J.F. Trans Tech Publications
4 Conference Proceedings Atomic scale control of epitaxial growth and interface in oxide thin films for advanced oxide lattice engineering Yoshimoto, M., Maeda, T., Ohnishi, T., Lee, G.H., Koinuma, H. Materials Research Society	10 Conference Proceedings EFFECTS OF EXCIMER LASER IRRADIATION ON MBE AND MO-MBE GROWTHS OF (Al)GaAs ON GaAs AND (Ca,Sr)F2/GaAs SUBSTRATES Donnelly, V. M., Tu, C. W., Beggy, J. C., McCrary, V. R., Harris, T. D., Lamont, M. G., Baiocchi, F. A., Farrow, R. C. Materials Research Society
5 Conference Proceedings *ATOMIC LAYER GROWTH OF HIGH Tc (Ca,Sr)CuO2 THIN FILMS BY LASER MBE Kanai, M., Kawai, T., Kawai, S. Materials Research Society	11 Conference Proceedings Comparison Of Low Temperature Growth Of Si Thin Films On Amorphous Substrates By MBE And PECVD Methods AnnaSelvan, J. A., Gobrecht, J., Grutzmacher, D., Kummer, M., Miiller, E., Rebien, M., vonKanel, H. Materials Research Society
6 Conference Proceedings Epitaxial growth of atomically smooth (111)-oriented MgO films on Si (111) substrate by pulsed laser deposition Chen, T. L., Li, X. M., Zhang, X., Yu, W. D., Gao, X. D. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition Kukli, K., Peussa, M., Johansson, L. -S., Nykanen, E., Niinisto, L. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12