An optical scanner based on cantilever-type electrostatic zipping actuators

An optical scanner based on cantilever-type electrostatic zipping actuators

Author(s):

S. M. N. Rao ( The Univ. of Texas at Arlington, USA )
P. Pandojirao-Sunkojirao ( The Univ. of Texas at Arlington, USA )
N. Dhaubanjar ( The Univ. of Texas at Arlington, USA )
M. Chiao ( The Univ. of British Columbia, Canada )
J. -C. Chiao ( The Univ. of Texas at Arlington, USA )

Publication title:

MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6836

Pub. Year:

2008

Page(from):

683617-1

Page(to):

683617-8

Pages:

8

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470119 [0819470112]

Language:

English

Call no.:

P63600/6836

Type:

Conference Proceedings

Details

TDL ID:	ZA00052467
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS Technologies and Applications
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2007.11.12-2007.11.14
Note for article:	MEMS/MOEMS technologies and applications III, 12-14 November 2007, Beijing, China - Poster Session (683617/6836-59)

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