A novel optical MEMS pressure sensor with a mesa diaphragm
- Author(s):
- Publication title:
- MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6836
- Pub. Year:
- 2008
- Page(from):
- 68360R-1
- Page(to):
- 68360R-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470119 [0819470112]
- Language:
- English
- Call no.:
- P63600/6836
- Type:
- Conference Proceedings
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