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Research and fabrication of harmonic oscillator with high quality in Si-based MOEMS acceleration seismic geophone

Author(s):
  • Z. Tong ( Tianjin Univ., China )
  • Z. Wang ( Tianjin Univ. of Technology, China )
  • D. En ( Tianjin Univ., China )
  • C. Chen ( Tianjin Univ., China )
  • X. Li ( Tianjin Univ. of Technology, China )
Publication title:
MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6836
Pub. Year:
2008
Page(from):
68360M-1
Page(to):
68360M-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470119 [0819470112]
Language:
English
Call no.:
P63600/6836
Type:
Conference Proceedings

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