New developments on polymer-based MEMS phase shifters

New developments on polymer-based MEMS phase shifters

Author(s):

J. Wang ( Univ. of Texas at Arlington, USA )
T. Ativanichayaphong ( Univ. of Texas at Arlington, USA )
Y. Cai ( Univ. of Texas at Arlington, USA )
W. -D. Huang ( Univ. of Texas at Arlington, USA )
M. Chiao ( Univ. of British Columbia, Canada )

Publication title:

MEMS/MOEMS technologies and applications III : 12-14 November 2007, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6836

Pub. Year:

2008

Page(from):

68360I-1

Page(to):

68360I-7

Pages:

7

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470119 [0819470112]

Language:

English

Call no.:

P63600/6836

Type:

Conference Proceedings

Details

TDL ID:	ZA00052467
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS Technologies and Applications
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2007.11.12-2007.11.14
Note for article:	MEMS/MOEMS technologies and applications III, 12-14 November 2007, Beijing, China - Session 5. RF MEMS (68360I/6836-05)

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