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Effect of hydrogen dilution on photoluminescent properties of nanocrystalline SiC films deposited by helicon wave plasma CVD

Author(s):
  • W. Yu ( Hebei Univ., China )
  • J. Du ( Hebei Univ., China )
  • L. Zhang ( Hebei Univ., China )
  • S. Cui ( Hebei Univ., China )
  • L. Han ( Hebei Univ., China )
Publication title:
Light-emitting diode materials and devices II : 12-14 November 2007, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6828
Pub. Year:
2008
Page(from):
682814-1
Page(to):
682814-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470034 [0819470031]
Language:
English
Call no.:
P63600/6828
Type:
Conference Proceedings

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