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Study on in-situ measuring method for average stress gradient of a MEMS film

Author(s):
  • H. Rong ( Nanjing Normal Univ., China )
  • M. Wang ( Nanjing Normal Univ., China )
Publication title:
Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6800
Pub. Year:
2008
Page(from):
680020-1
Page(to):
680020-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819469717 [0819469718]
Language:
English
Call no.:
P63600/6800
Type:
Conference Proceedings

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