Microstructured humidity sensors fabricated by glancing angle deposition: Characterization and performance evaluation

Microstructured humidity sensors fabricated by glancing angle deposition: Characterization and performance evaluation

Author(s):

K. M. Krause ( Univ. of Alberta, Canada )
A. van Popta ( Univ. of Alberta, Canada )
J. J. Steeie ( Univ. of Alberta, Canada )
J. C. Sit ( Univ. of Alberta, Canada )
M. J. Brett ( Univ. of Alberta, Canada )

Publication title:

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6800

Pub. Year:

2008

Page(from):

68000Y-1

Page(to):

68000Y-11

Pages:

11

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819469717 [0819469718]

Language:

English

Call no.:

P63600/6800

Type:

Conference Proceedings

Details

TDL ID:	ZA00052431
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology
Conf. info. (Number):	2007 : 4th
Conf. info. (Venue):	Canberra, Australia
Conf. info. (Date):	2007.12.05-2007.12.07
Note for article:	Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, 5-7 December 2007, Canberra, Australia - Session 9. Detectors, PV, and Sensors (6800-35)

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