Two-degree-of-freedom control of a self-sensing micro-actuator for HOD

Two-degree-of-freedom control of a self-sensing micro-actuator for HOD

Author(s):

M. Sasaki ( Gifu Univ., Japan )
K. Fujihara ( Gifu Univ., Japan )
Y. Nam ( Kangwon National Univ., South Korea )
S. Ito ( Gifu Univ., Japan )

Publication title:

ICMIT 2007, mechatronics, MEMS, and smart materials

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6794

Pub. Year:

2008

Vol.:

2

Page(from):

679436-1

Page(to):

679436-6

Pages:

6

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819469595 [0819469599]

Language:

English

Call no.:

P63600/6794

Type:

Conference Proceedings

Details

TDL ID:	ZA00052425
Series ID:	PA00000029
Conf. info. (Name):	ICMIT
Conf. info. (Number):	2007
Conf. info. (Venue):	Gifu, Japan
Conf. info. (Date):	2007.12.05-2007.12.06
Note for article:	ICMIT2007, 5-6 December 2007, Gifu, Japan - Smart Materials (6794-113)

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