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Performance comparison of techniques for intro-field CD control improvement

Author(s):
  • R. Pforr ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • M. Hennig ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • J. Reichelt ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • G. Ben Zvi ( Pixer Technology Ltd., Israel )
  • M. Sczyrba ( Advanced Mask Technology Ctr., Germany )
Publication title:
Photomask technology 2007
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730
Pub. Year:
2007
Vol.:
2
Page(from):
673032-1
Page(to):
673032-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468871 [0819468878]
Language:
English
Call no.:
P63600/6730
Type:
Conference Proceedings

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