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Simulation on signal processing of focusing and leveling measurement system

Author(s):
  • X. Li ( Huazhong Univ. of Science and Technology, China )
  • F. Chen ( Shanghai Micro Electronics Equipment Co., Ltd., China )
  • Z. Li ( Shanghai Micro Electronics Equipment Co., Ltd., China )
Publication title:
Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6724
Pub. Year:
2007
Page(from):
67241R-1
Page(to):
67241R-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468819 [0819468819]
Language:
English
Call no.:
P63600/6724
Type:
Conference Proceedings

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