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Research on effects of phase error in phase-shifting interferometer

Author(s):
  • H. Wang ( Xi'an Jiaotong Univ, China )
  • Z. Wang ( Xi'an Jiaotong Univ., China )
  • H. Zhao ( Xi'an Jiaotong Univ., China )
  • A. Tian ( Xi'an Univ. of Technology, China )
  • B. Liu ( Xi'an Univ. of Technology, China )
Publication title:
Optical test and measurement technology and equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6723
Pub. Year:
2007
Vol.:
2
Page(from):
67233W-1
Page(to):
67233W-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468802 [0819468800]
Language:
English
Call no.:
P63600/6723
Type:
Conference Proceedings

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