Properties of DC magnetron sputtered indium-tin oxide films with the assistance of tiny H2O vapor at low temperature

Properties of DC magnetron sputtered indium-tin oxide films with the assistance of tiny H₂O vapor at low temperature

Author(s):

H. Lin ( Univ. of Electronic Science and Technology of China, China )
J. Yu ( Univ. of Electronic Science and Technology of China, China )
S. Lou ( Univ. of Electronic Science and Technology of China, China )
J. Wang ( Univ. of Electronic Science and Technology of China, China )
Y. Jiang ( Univ. of Electronic Science and Technology of China, China )

Publication title:

Advanced optical manufacturing technologies

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6722

Pub. Year:

2007

Vol.:

2

Page(from):

672243-1

Page(to):

672243-5

Pages:

5

Pub. info.:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468796 [0819468797]

Language:

English

Call no.:

P63600/6722

Type:

Conference Proceedings

Details

TDL ID:	ZA00052368
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Advanced Optical Manufacturing and Testing Technologies
Conf. info. (Number):	2007 : 3rd
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2007.07.08-2007.07.12
Note for article:	3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 8-12 July 2007, Chengdu, China - Poster session (6722-146)

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