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Ion beam sputter deposition of zirconia thin films

Author(s):
  • W. Jin ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
  • C. Jin ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
  • L. Liu ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
  • H. Zhu ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
  • H. Yang ( Changchun Institute of Optics, Fine Mechanics and Physics (China) )
Publication title:
International Symposium on Photoelectronic Detection and Imaging 2007, optoelectronic system design, manufacturing, and testing : 9-12 September 2007, Beijing China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6624
Pub. Year:
2008
Page(from):
66241A-1
Page(to):
66241A-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819467669 [0819467669]
Language:
English
Call no.:
P63600/6624
Type:
Conference Proceedings

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