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Closed loop high precision position control system with optical scale

Author(s):
  • C. Ge ( Univ. of Electric and Scientific Technology of China (China) )
  • Y. Liao ( Institute of Applied Electronics, China Academy of Engineering Physics (China) )
  • Z. He ( Institute of Applied Electronics, China Academy of Engineering Physics (China) )
  • Z. Luo ( Institute of Applied Electronics, China Academy of Engineering Physics (China) )
  • Z. Huang ( Institute of Applied Electronics, China Academy of Engineering Physics (China) )
Publication title:
International Symposium on Photoelectronic Detection and Imaging 2007, optoelectronic system design, manufacturing, and testing : 9-12 September 2007, Beijing China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6624
Pub. Year:
2008
Page(from):
662418-1
Page(to):
662418-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819467669 [0819467669]
Language:
English
Call no.:
P63600/6624
Type:
Conference Proceedings

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