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Dual Function Polyvinyl Alcohol Based Oxide Precursors for Nanoimprinting and Electron Beam Lithography

Author(s):
Publication title:
Solution synthesis of inorganic functional materials - films, nanoparticles and nanocomposites : symposium held April 1-5, 2013, San Francisco, California U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1547
Pub. Year:
2013
Page(from):
75
Page(to):
80
Pages:
6
Pub. info.:
Warrendale, Pa: Materials Research Society
ISSN:
02729172
ISBN:
9781605115245 [160511524X]
Language:
English
Call no.:
M23500/1547
Type:
Conference Proceedings

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