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High Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH4+H2

Author(s):
Publication title:
PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea
Title of ser.:
Materials science forum
Ser. no.:
561-565
Pub. Year:
2007
Vol.:
561-565
Pt.:
2
Page(from):
1209
Page(to):
1212
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494620 [0878494626]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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